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Characterization of microwave plasmas for deposition of polyparylene
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2009
Journal Article
Title
Characterization of microwave plasmas for deposition of polyparylene
Author(s)
Franz, G.
Rauter, F.
Dribinskiy, S.F.
Fraunhofer-Institut für Verfahrenstechnik und Verpackung IVV
Journal
Journal of vacuum science and technology A. Vacuum, surfaces and films
DOI
10.1116/1.3148825
Language
English
Fraunhofer-Institut für Verfahrenstechnik und Verpackung IVV
