SPM investigation of metal/carbon-multilayer surfaces prepared by pulsed laser deposition -PLD-.

Topographic features on surfaces of metal/carbon-multilayers have been studied by scanning probe microscopy (SPM) under ambient conditions. Surface properties of such alternating multilayers are of particular interest for soft X-ray optical purposes. They are generated by laser pulse vapour deposition under UHV-conditions with thicknesses each in the nm-range. The atomic force microscopy is capable of providing additional information concerning the surface roughness with respect to optical and electron microscopy. The topographic images show a mainly flat suface with noise lower than 2 nm over a 100 x 100 qmym area with randomly distributed peaks. A comparision with results of other surface investigation methods is carried out.