VULSTAR: A laser based system for measuring light scattering, transmittance, and reflectance at 157 nm and 193 nm
Abstract
A system is presented that measures total and angle resolved light scattering, reflectance and transmittance at 193 nm and 157 nm. This system allows the investigation of substrates and coatings for deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) components with high sensitivity, down to scattering levels of 1 ppm for total scatter measurement The dynamic range of the angle resolved scatter measurement set-up exceeds 9 orders of magnitude.
