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Characterization of a new electron cyclotron resonance source working with permanent magnets
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1991
Journal Article
Title
Characterization of a new electron cyclotron resonance source working with permanent magnets
Author(s)
Neumann, G.
Journal
Journal of vacuum science and technology B. Microelectronics and nanometer structures
Conference
Workshop on High-Density Plasma Techniques and Processes for Integrated Circuit Fabrication 1990
DOI
10.1116/1.585614
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
