English
Deutsch
Log In
Email address
Password
Log in
or
Log in with Shibboleth
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Characterization of a new electron cyclotron resonance source working with permanent magnets
Details
Full
Export
Statistics
Options
1991
Zeitschriftenaufsatz
Titel
Characterization of a new electron cyclotron resonance source working with permanent magnets
Author(s)
Neumann, G.
Zeitschrift
Journal of vacuum science and technology B. Microelectronics and nanometer structures
Konferenz
Workshop on High-Density Plasma Techniques and Processes for Integrated Circuit Fabrication 1990
DOI
10.1116/1.585614
Language
Englisch
google-scholar
View Details
ISIT
