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Additive Direct Writing: A Tool for 3D Chip Integration?
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1994
Conference Paper
Title
Additive Direct Writing: A Tool for 3D Chip Integration?
Author(s)
Meyer, J.-U.
Mrosk, J.
Mainwork
Micro System Technologies '94
Conference
International Conference and Exhibition on Micro Electro, Opto, Mechanical Systems and Components 1994
Language
English
Fraunhofer-Institut für Biomedizinische Technik IBMT
