Plasmaätzen zum Reinigen und Modifizieren von Oberflächen

Dry plasmaetching is a new approach for an environmentally safe cleaning and drying of metallic and polymer surfaces. Corrosion or temperature sensitive materials can be processed successfully. In case of plastics, plasmaetching is accompanied by a modification of the polymer surface thus creating active organic coatings. In the paper, typical applications of plasmaetching in surface technology for cleaning and drying, vacuum and electrochemical coating, organic coating and ashing will be presented.