Integration and fabrication of PZT and metallic glass films for micro-mirror device

2013

Conference Paper

Author(s)

Tsai, Y.-C.

Lee, J.-W.

Naono, T.

Lin, Y.-C.

Esashi, M.

Fujii, T.

Geßner, Thomas

Mainwork

Smart Systems Integration 2013. CD-ROM

Conference

International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2013