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Cobalt advanced barrier metallization: A resist composition analysis
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2014
Conference Paper
Title
Cobalt advanced barrier metallization: A resist composition analysis
Author(s)
Wislicenus, Marcus
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Liske, Romy
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Gerlich, Lukas
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Vasilev, Boris
Preusse, Axel
Mainwork
MAM 2014, Workshop on "Materials for Advanced Metallization". CD-ROM
Conference
Workshop on "Materials for Advanced Metallization" (MAM) 2014
Workshop Devoted to Materials Research, Materials Properties and Interactions 2014
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
