Crosstalk analysis and correction in on-wafer measurements at WR-3 band frequencies

Crosstalk between radio frequency probes degrades the accuracy in on-wafer measurements. Although a lot of research to account for the crosstalk influence in the calibration was published, up to now no conclusive procedure is known. In this paper, we show how the crosstalk is affected by the change of measurement environment and present an approach, based on electromagnetic field simulations of the device under test including the probes, how the behavior can be predicted and corrected. To verify the presented concept, a 180CR discrete phase shifter operating in the 200 - 330 GHz frequency range is analyzed and the crosstalk distorted measurement results are successfully corrected.