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2017
Doctoral Thesis
Title
Nanoporous thin films made by atomic layer deposition and molecular layer deposition
Title Supplement
Applications as antireflection coatings and for encapsulation of optical gratings
Other Title
Nanoporöse dünne Schichten mittels Atomlagenabscheidung und Moleküllagenabscheidung
Thesis Note
Jena, Univ., Diss., 2017
Publishing Place
Jena