2011
Conference Paper
Title

MEMS mirror for low cost laser scanners

Abstract
The concept and design of a low cost two-axes MEMS scanning mirror with an aperture size of 7 millimetres for a compact automotive LIDAR sensor is presented. Hermetic vacuum encapsulation and stacked vertical comb drives are the key features to enable a large tilt angle of 15 degrees. A tripod MEMS mirror design provides an advantageous ratio of mirror aperture and chip size and allows circular laser scanning.
Author(s)
Hofmann, U.
Janes, J.
Mainwork
Conference
DOI
Language
English