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Functional nano patterns realized by aligned nano imprint lithography
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2014
Conference Paper
Title
Functional nano patterns realized by aligned nano imprint lithography
Author(s)
Baum, Mario
Besser, J.
Wiemer, Maik
Thanner, C.
Kreindl, G.
Wimplinger, M.
Geßner, Thomas
Mainwork
Smart Systems Integration 2014
Conference
Smart Systems Integration Conference (SSI) 2014
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2014
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
