A chemical microanalysis system as a microfluid system demonstrator

An integrated microfluid demonstrator with outer dimensions of 19.5*43 mm2 was developed comprising three micro pumps, three flow sensors, two conductivity sensors and two passive check valves. The devices are mounted onto a silicon backplane, micro channels are etched on its backside to connect all devices. The demonstrator, controlled by a system control, is able to perform a measurement cycle including sensor calibration, sample sucking, conductivity measurement and rinsing. During the development, a proposal concerning a general interfacing standard for microfluid systems was worked out.