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Optimized 9×2-inch MOVPE reactor for the growth of Al-containing antimonides
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2004
Zeitschriftenaufsatz
Titel
Optimized 9×2-inch MOVPE reactor for the growth of Al-containing antimonides
Author(s)
Dimroth, F.
Bett, A.W.
Giesen, C.
Heuken, M.
Zeitschrift
Journal of Crystal Growth
DOI
10.1016/j.jcrysgro.2004.08.039
Language
Englisch
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ISE
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Epitaxie
Epitaxie MOVPE