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Design of asynchronous dielectric micromotors
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1994
Journal Article
Title
Design of asynchronous dielectric micromotors
Author(s)
Hagedorn, R.
Fuhr, G.
Müller, T.
Schnelle, T.
Schnakenberg, U.
Wagner, B.
Journal
Journal of electrostatics
DOI
10.1016/0304-3886(94)90052-3
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
