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Scenario for a yield model based on reliable defect density data and linked to advanced process control
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2006
Conference Paper
Title
Scenario for a yield model based on reliable defect density data and linked to advanced process control
Author(s)
Nutsch, A.
Öchsner, R.
Mainwork
Silicon materials science and technology X
Conference
International Symposium on Silicon Materials Science and Technology 2006
DOI
10.1149/1.2195679
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
