2005
Conference Paper
Title

Optical MEMS for advanced spectrometers

Abstract
Optical MEMS based spectrometers capable to perform time resolved measurements from VIS to NIR are presented. They are based on high frequency scanning gratings with V-groove-structure and translational mirrors for Fourier-Transform-Spectrometers, respectively.
Author(s)
Schenk, H.
Grüger, H.
Zimmer, F.
Scherf, W.
Carianthian Tech Research AG, Austria
Kenda, A.
Carianthian Tech Research AG, Austria
Mainwork
Conference
DOI
Language
English