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  4. Model transformation for coupled electro-mechanical simulation in an electronics simulator
 
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1995
Journal Article
Title

Model transformation for coupled electro-mechanical simulation in an electronics simulator

Abstract
The simulatin of microsystems requires to handle the close coupling between electronical and mechanical components. This interaction between electronics and mechanics often is an inherent and essential property of such systems. Therefore, dynamical electromechanical simulations are indespensable for the eyamination of the system behavior. For this purpose, we developed a method which enables dynamical electro-mechanical simulations within an electronical circuit simulator.
Author(s)
Pelz, G.
Bielefeld, J.
Zimmer, G.
Journal
Microsystem Technologies  
DOI
10.1007/BF01371491
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Keyword(s)
  • Druckmessung

  • Meßaufnehmer

  • Mikrosystemtechnik

  • Systemsimulation

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