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Simulation and reliability on the way from micro to nano
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2003
Conference Paper
Title
Simulation and reliability on the way from micro to nano
Author(s)
Michel, B.
Wunderle, B.
Mainwork
21. CAD-FEM User's Meeting 2003
Conference
CAD-FEM Users' Meeting 2003
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
