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Thermally driven microvalve with buckling behaviour of pneumatic applications 2
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1996
Journal Article
Title
Thermally driven microvalve with buckling behaviour of pneumatic applications 2
Author(s)
Lisec, T.
Quenzer, H.J.
Kreutzer, M.
Hoerschelmann, S.
Wagner, B.
Benecke, W.
Journal
Sensors and Materials : S and M
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
