Applications of silicon-microactuators based on bimorph structures

Microactuators for electromechanical signal conversion will be described. Basic elements of the transducer is a bimorph structure combined with an integrated heat source. Due to the differences of the coefficients of thermal expansion, a temperature controlled deformation of the bimorph structures occurs. Bulk and surface micromachining techniques can be used to achieve an object displacement perpendicular to or within the substrate plane respectively. The main advantages of this class of actuators are simple fabrication processes and operation at standard IC-voltage levels allowing further system integration. The conversion characteristics will be described and the application of these transducers for microvalves, optical components, manipulators and motors will be discussed.