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Compact source and beam delivery system for EUV radiation using a Schwarzschild objective
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2005
Conference Paper
Title
Compact source and beam delivery system for EUV radiation using a Schwarzschild objective
Author(s)
Mann, K.
Barkusky, F.
Bayer, A.
Peth, C.
Töttger, H.
Feigl, T.
Kaiser, N.
Mainwork
Laser-generated synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II
Conference
Conference "Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications" 2005
DOI
10.1117/12.614989
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
