English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Energetic substrate bonbardment in reactive sputtering with flange-mounted magnetrons in different pulse modes
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2002
Conference Paper
Title
Energetic substrate bonbardment in reactive sputtering with flange-mounted magnetrons in different pulse modes
Author(s)
Bartzsch, H.
Frach, P.
Goedicke, K.
Gottfried, C.
Mainwork
Society of Vacuum Coaters. 45th Annual Technical Conference 2002. Proceedings
Conference
Society of Vacuum Coaters (Annual Technical Conference) 2002
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
