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Influence of the initial surface roughness on the wear behaviour of micro probes under rotating and oscillating flat micro contact
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2003
Conference Paper
Title
Influence of the initial surface roughness on the wear behaviour of micro probes under rotating and oscillating flat micro contact
Author(s)
Beck, M.
Bandorf, R.
Lüthje, H.
Sick, J.-H.
Gatzen, H.-H.
Mainwork
MICRO.tec 2003: Applications - trends - visions. Proceedings
Conference
World Microtechnologies Congress (MICRO.tec) 2003
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST