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Progress in high-rate electron beam evaporation of oxides for web coating
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1993
Conference Paper
Title
Progress in high-rate electron beam evaporation of oxides for web coating
Author(s)
Schiller, S.
Neumann, M.
Morgner, H.
Schiller, N.
Mainwork
Society of Vacuum Coaters. 36th Annual Technical Conference 1993. Proceedings
Conference
Society of Vacuum Coaters (Annual Technical Conference) 1993
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
