Development of charged particle detectors by integrating gas amplification stages and CMOS ASICs on wafer level

Gaseous detectors with a highly pixelized readout have demonstrated good capabilities of tracking high energetic particles. In particular, using post-processing methods to integrate the gas amplification stage on top of pixel readout chips has proven to detect single electrons with a very high efficiency and accuracy. So far, these detectors called InGrids or GEMGrids have been produced in a chip based process at the University of Twente. A new wafer based production process has been set up. A first test sample has been produced and tested. Signals from a as well as from a source could be observed.