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Modelling and simulation for dielectric constant of aerogel
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2000
Journal Article
Title
Modelling and simulation for dielectric constant of aerogel
Author(s)
Xiao, X.
Streiter, R.
Ruan, G.
Song, R.R.
Otto, T.
Gessner, T.
Journal
Microelectronic engineering
DOI
10.1016/S0167-9317(00)00257-4
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
