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  4. Plasma-enhanced CVD of ZnO with varying doping levels on different substrates
 
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2011
Presentation
Title

Plasma-enhanced CVD of ZnO with varying doping levels on different substrates

Title Supplement
Presentation held at the 26th European Photovoltaic Solar Energy Conference and Exhibition, Hamburg 2011
Other Title
Plasmaunterstütze CVD von ZnO mit verschiedenen Dotierniveaus auf unterschiedlichen Substraten
Author(s)
Schmidt, J.
Kinski, I.
Michaelis, A.
Uhlig, S.
Conference
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) 2011  
File(s)
Download (834.28 KB)
Rights
Use according to copyright law
DOI
10.24406/publica-fhg-372036
Language
English
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Keyword(s)
  • PECVD

  • ZnO

  • doping

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