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Implication of oxygen vacancies on current conduction mechanisms in TiN/Zr1-xAlxO2/TiN metal-insulator-metal structures
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2011
Journal Article
Title
Implication of oxygen vacancies on current conduction mechanisms in TiN/Zr1-xAlxO2/TiN metal-insulator-metal structures
Author(s)
Paskaleva, A.
Lemberger, M.
Bauer, A.J.
Frey, L.
Journal
Journal of applied physics
Open Access
DOI
10.1063/1.3565056
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB