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Dielectric material impact on capacitive RF MEMS reliability
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2004
Conference Paper
Title
Dielectric material impact on capacitive RF MEMS reliability
Author(s)
Lisec, T.
Huth, C.
Wagner, B.
Mainwork
GAAS 2004. 12th European Gallium Arsenide & other Compound Semiconductors Application Symposium
Conference
European Gallium Arsenide and Other Compound Semiconductors Application Symposium 2004
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English
Fraunhofer-Institut für Siliziumtechnologie ISIT
