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A silicon vibration sensor for tool state monitoring working in the high acceleration range
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2000
Journal Article
Title
A silicon vibration sensor for tool state monitoring working in the high acceleration range
Author(s)
Thomas, J.
Kühnhold, R.
Schnupp, R.
Ryssel, H.
Journal
Sensors and Actuators. A
DOI
10.1016/S0924-4247(00)00379-4
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
