• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Artikel
  4. Laser-produced lithium plasma as a narrow-band extended ultraviolet radiation source for photoelectron spectroscopy
 
  • Details
  • Full
Options
1998
Journal Article
Title

Laser-produced lithium plasma as a narrow-band extended ultraviolet radiation source for photoelectron spectroscopy

Abstract
Extended ultraviolet (EUV) emission characteristics of a laser-produced lithium plasma are determined with regard to the requirements of x-ray photoelectron spectroscopy. The main features of interest are spectral distribution, photon flux, bandwidth, source size, and emission duration. Laser-produced lithium plasmas are characterized as emitters of intense narrow-band EUV radiation. It can be estimated that the lithium Lyman-alpha line emission in combination with an ellipsoidal silicon/molybdenum multilayer mirror is a suitable EUV source for an x-ray photoelectron spectroscopy microscope with a 50-meV energy resolution and a 10-mu m lateral resolution.
Author(s)
Schriever, G.
Mager, S.
Naweed, A.
Engel, A.
Bergmann, K.
Lebert, R.
Journal
Applied optics  
DOI
10.1364/AO.37.001243
Language
English
Fraunhofer-Institut für Lasertechnik ILT  
Keyword(s)
  • EUV-based process

  • gas discharge

  • high photon flux

  • photoabsorption cross section

  • photoelectron emission microscope

  • radiation

  • x-ray source

  • XPS analysis

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024