English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Have you forgotten your password?
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
ONO structures investigated by SIMS, RBS, and NRA
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1992
Journal Article
Title
ONO structures investigated by SIMS, RBS, and NRA
Author(s)
Ramm, P.
Iberl, F.
Lang, W.
Journal
Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms
Conference
International Conference on Ion Beam Analysis 1991
Language
English
IFT
