2000
Conference Paper
Title

Ion projection lithography for resistless patterning of thin magnetic films

Author(s)
Brünger, W.
Torkler, M.
Dzionk, C.
Terris, B.D.
Folks, L.
Weller, D.
Rothuizen, H.
Vettiger, P.
Stangl, G.
Fallmann, W.
Mainwork
Conference
DOI
Language
English