Qualification of glass-ceramics (LTCC) for optical and opto-electronic applications

The modification potential for low temperature co-fired ceramics (LTCC) and the processes by which they are manufactured were tested with the aim of incorporating modern glass-ceramic materials as optical elements for reflection or for defined forward scattering. A new green-foil was developed with grain size down to 6 00 nm - 700nm for better moulding optical-flat surfaces. The compatibility of additional technological steps for cold embossing as well as punching the green-foil stacks with regard to the traditional thick-film metalization and sintering processes was proven. A surface roughness better than 200nm rms has been achieved without additional smoothing steps.