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The physical fundamentals of thin film machining
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1974
Conference Paper
Title
The physical fundamentals of thin film machining
Author(s)
Schiller, S.
Panzer, S.
Heisig, U.
Mainwork
Electron and ion beam science and technology 1974. Sixth International Conference
Conference
International Conference on Electron and Ion Beam Science and Technology 1974
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
