English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Analytical model for phosphorus large angle tilted implantation
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1995
Conference Paper
Title
Analytical model for phosphorus large angle tilted implantation
Author(s)
Burenkov, A.
Fraunhofer-Institut für Integrierte Schaltungen IIS
Bohmayr, W.
Lorenz, J.
Ryssel, H.
Selberherr, S.
Mainwork
6th International Conference on Simulation of Semiconductor Devices and Processes. SISDEP '95. Proceedings
Conference
International Conference on Simulation of Semiconductor Devices and Processes (SISDEP) 1995
Language
English
IIS-B
