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  4. A novel electrostatic actuator, the Nano-E-Drive, and its integration in a micropump design
 
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2018
Presentation
Title

A novel electrostatic actuator, the Nano-E-Drive, and its integration in a micropump design

Title Supplement
Presentation held at Seminar "A New Type of Electrostatic Transducer, the Nano-Electrostatic Drive", Laboratory for Analysis and Architecture of Systems (LAAS), 11. September 2018, Toulouse
Author(s)
Gaudet, Matthieu
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Conference
Seminar "A New Type of Electrostatic Transducer, the Nano-Electrostatic Drive" 2018  
Request publication:
bibliothek@ipms.fraunhofer.de
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
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