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In-situ measurement of microstructured surfaces in ultra precision machines
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2004
Conference Paper
Title
In-situ measurement of microstructured surfaces in ultra precision machines
Author(s)
Pfeifer, Tilo
SchneefuĂ, Karsten
Mainwork
XI. International Colloquium on Surfaces = XI. Internationales Oberflächenkolloquium 2004. Proceedings. Vol.1
Conference
Internationales Oberflächenkolloquium 2004
International Colloquium on Surfaces (ICS) 2004
Language
English
Fraunhofer-Institut fĂźr Produktionstechnologie IPT
