Advanced Processing of ITO and IZO Thin Films on Flexible Glass

Ultra-thin 100µm thick flexible glasses with a maximum dimension of 250×300 mm2 were deposited with transparent conductive ITO and IZO using in-line magnetron sputtering under pilot scale conditions. The flexible glass was coated at room temperature with ITO and IZO and further refined by dynamic flash lamp annealing (FLA) in the millisecond range. After flashing the films, we achieved an improved transmittance and a reduced sheet resistance of the films