Charge and Capacitance Sensitive Field Effect Device for Measurements in Gases and Liquids

For the first time, a novel field-effect device, the Charge and Capacitance Sensitive Field Effect Transistor (CCSFET), has been developed and fabricated using CMOS technology. The CCSFET enables precise charge and capacitance measurements in both gases and liquids. It integrates a chemically sensitive capacitor with a potential probe acting as a floating gate for a MOS transistor. Measurements for hydrogen detection in air, pH sensing, and phase change detection were successfully conducted.