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Micro injection moulded MEMS with integrated piezoelectric PVDF
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2012
Conference Paper
Title
Micro injection moulded MEMS with integrated piezoelectric PVDF
Author(s)
Heinrich, H.
Schulze, R.
Wegener, M.
Kroll, L.
Walther, M.
Schueller, M.
Geßner, Thomas
Mainwork
System-integrated intelligence: New challenges for product and production engineering
Conference
Joint International Symposium on System-Integrated Intelligence (SYSINT) 2012
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
