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Properties of cadmium stannate thin films produced by reactive high rate d.c. magnetron-plasmatron sputtering
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1982
Journal Article
Title
Properties of cadmium stannate thin films produced by reactive high rate d.c. magnetron-plasmatron sputtering
Author(s)
Schiller, S.
Beister, G.
Buedke, E.
Becker, H.-J.
Schicht, H.
Journal
Thin solid films
DOI
10.1016/0040-6090(82)90609-5
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP