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  4. Nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Manufacturing, characterization, and application
 
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2010
Poster
Title

Nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Manufacturing, characterization, and application

Title Supplement
Poster at 14th European FIB Users Group Meeting (EFUG 2010), Gaeta, Italy
Author(s)
Jambreck, J.D.
Yanev, V.
Schmitt, H.
Rommel, Mathias  orcid-logo
Bauer, A.J.
Frey, L.
Conference
European FIB Users Group Meeting (EFUG) 2010  
DOI
10.24406/publica-fhg-367228
File(s)
002.pdf (660.54 KB)
Rights
Under Copyright
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • metal tip

  • nanoimprint lithography

  • scanning probe microscopy

  • FIB

  • TUNA

  • SCM

  • NIL

  • SPM

  • AFM

  • atomic force microscopy

  • scanning capacitance microscopy

  • focused ion beam

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