English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Have you forgotten your password?
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Electron beam evaporation and high-rate sputtering with plasmatron/magnetron systems - a comparison (Teil II)
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1978
Journal Article
Title
Electron beam evaporation and high-rate sputtering with plasmatron/magnetron systems - a comparison (Teil II)
Author(s)
Schiller, S.
Heisig, U.
Goedicke, K.
Journal
Vakuum-Technik
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
