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Simulation of the dielectric constant of aerogels and estimation of their water content
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2001
Journal Article
Title
Simulation of the dielectric constant of aerogels and estimation of their water content
Author(s)
Xiao, X.
Streiter, R.
Wolf, H.
Ruan, G.
Murray, C.
Gessner, T.
Journal
Microelectronic engineering
DOI
10.1016/S0167-9317(00)00428-7
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM