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A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases
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2015
Conference Paper
Title
A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases
Author(s)
Ebermann, M.
Neumann, N.
Binder, S.
Meinig, Marco
Seifert, Mario
Kurth, Steffen
Hiller, Karla
Mainwork
18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Conference
International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) 2015
DOI
10.1109/TRANSDUCERS.2015.7181356
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
