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Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
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2006
Conference Paper
Title
Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
Author(s)
Forke, Roman
Scheibner, D.
Mehner, J.
Geßner, Thomas
Doetzel, W.
Mainwork
Eurosensors XX. Proceedings
Conference
Eurosensors 2006
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
