F- and Cl-terminations of (100)-oriented single crystalline diamond

The surface termination of single crystalline diamond with fluorine and chlorine was investigated. The diamond was exposed to SF(6) inductively coupled plasma for fluorination and to Cl(2) plasma for chlorination. For the fluorine termination, the plasma treatment caused one monolayer of fluorine (measured with two angle photoelectron detection) and no carbonyl fluorides on the diamond surface. Furthermore no graphitization or roughening of the surface was observed. The plasma treatment with chlorine led to rough surfaces.