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Packaging and characterization of miniaturized spectral sensing devices
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2004
Conference Paper
Title
Packaging and characterization of miniaturized spectral sensing devices
Author(s)
Otto, T.
Saupe, R.
Stock, V.
Fritzsch, U.
Bruch, R.
Gessner, T.
Mainwork
MOEMS and miniaturized systems IV
Conference
Conference "MOEMS and Miniaturized Systems" 2004
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM